教授課程

微奈米製造技術, 光電半導體材料製造技術, 機械製造實習

榮譽獎項

1. Co-program Chair, International Nanoimprint and Nanoprint Technology Conference (NNT 2008), Kyoto, Japan, Oct., 2008.
2. Symposium Organizer and International Committee, The 1st Asian Symposium of Nanoimprint Lithography, Seoul, Korea, April 24-26, 2008.
3. Invited speaker,"Roll-to–Roll Micro/Nano Imprint and Applications", International Advanced Surface Technology Exhibition and Conference, Tokyo Big Sight, Tokyo, Japan, Feb., 2008.
4. Invited speaker, "Development of Rolling Nanoimprint Technology and Related Applications", International Nanoimprint and Nanoprint Technology Conference (NNT 2007), Paris, France, Oct., 2007.
5. Invited speaker, "Status of the Nanoimprint Technology in ITRI", Nanoimprint Process Solution Consortium, Tsukuba, Japan, Feb., 2007.
6.“氣動工具照明裝置”, 2007日內瓦國際發明展, 工具類銀牌
7.“氣動工具照明裝置”, 2007匹茲堡國際發明展, 大會評審傑出?金牌?, 設計類銅牌?
8.“氣動工具照明裝置”, 2007紐倫堡國際發明展, 綜合發明新產品類, 金牌?
9. FY96工研院傑出研究獎銅牌獎 “次世代晶圓測試探針卡技術”
10. FY96 工研院影像顯示中心卓越研究創新獎 ”驅動列印新產業-可調變噴墨回饋控制技術”
11. Invited speaker,“Roll to Roll Imprint Activities in MSL”, 奈米壓印技術及奈米光學研討會, 成功大學, Dec., 2006.
12. FY95工研院機械所年度論文發表獎
13. FY95工研院機械所傑出創新獎 ”微奈米結構滾筒模具與應用技術”
14. Invited speaker,“奈米轉印技術”, 第八屆海峽兩岸機械工程技術交流會, 台北福華, Dec., 2005.
15. FY94工研院機械所創新研究獎 ”奈米製造技術”
16. FY94經濟部創新技術獎 “微發電機技術”
17. FY90 經濟部創新研究獎“硬脆材料延性加工技術”
18. FY89 工研院成果貢獻銀牌? ”硬脆基板延性加工技術”
19. Invited speaker,“硬脆材料基板的Fine Grinding加工法”, 磨粒加工技術論文發表會, 台北, 1999.
20. Invited lecture, “Modeling the Performance of Magnetic Fluid Grinding”, ACME Research Conference, London, 1996.

期刊論文

1. Chia-Jen Ting, Fuh-Yu Chang, Chi-Feng Chen, C. P. Chou, “Fabrication of an

antireflective optical film with subwavelength structures using Roll to Roll imprinting

process”, submitted to Journal of Micromechanics and Microengineering, Vol. 18,

2008, pp. 1-9. (SCI)

2. C.H. Lin, H. Yang, F.Y. Chang, S.H. Chang, M.T. Yen, “Fast Patterning

Microstructures Using Inkjet Printing Conformal Masks”, Microsystem Technologies,

Published online: 5 February, 2008. (SCI)

3. C.H. Kuo, M.C. Huang, F.Y. Chang, C.H. Lin, “Integrating an Enzyme-Rentrapped

Conducting Polymer Electrode and a Prereactor in a Microfluidic System for Sensing

Glucose”, Electroanalysis, Vol. 20, No. 6, 2008, pp. 635-642. (SCI)

4. Y.J. Yang, M.Y. Cheng, W.Y. Chang, L.C. Tsao, S.A. Yang, W.P. Shih, F.Y. Chang,

S.H. Chang, K.C. Fan, “An Integrated Flexible Temperature and Tactile Sensing

Array using PI-copper films”, Sensors and Actuators A: Physical,

Vol. 143, Issue 1, 2008, Pages 143-153. (SCI)

5. Chi-Hsiang Hsieh, Jiunn-Der Liao, Chang-Shu Kuo, Chao-Yu Huang, Bo-Hsiung

Wu, Fuh--Yu Chang, “Lithographical Method by Oxidation through a Conductive

Template in Contact with a Silicon Substrate Mediated by a Thin Water Layer”,

Japanese Journal of Applied Physics, Vol. 47, No. 4, 2008, pp. 2456-2459. (SCI)

6. F.C. Wang, H.M. Lin, P.K. Chen, F.Y. Chang and K.C. Fan, “Signal Detection and

Control of an Intelligent Robot”, Key Engineering Materials, Vols. 381-382, 2008, pp.

387-390. (EI)

7. K.T. Song, M.J. Han, F.Y. Chang, S.H. Chang, “A Robotics Facial Expression

Recognition System Using Real-Time Vision System”, Key Engineering Materials,

Vols. 381-382, 2008, pp. 375-378. (EI)

8. Y.J. Yang, B.T. Chia, D.R. Chang, H.H. Liao, W.P. Shih, F.Y. Chang, K.C. Fan,

“Development of A Flexible Temperature Sensor Array System”, Key Engineering

Materials, Vols. 381-382, 2008, pp. 383-386. (EI)

9. C.T. Pan, H. Yang, M.K. Wei, F.Y. Chang, “PET Polymer Ablation Using ExcimerLaser for Nozzle Plate Application”, Materials Science and Technology, Vol. 23, 2007,

pp 980-986. (SCI)

10. H. Yang, C.T. Lee, F.Y. Chang, “Miniaturized fluorescence excitation platform

with optical fiber for bio-detection chips”, Microsystem Technologies, Volpp 80-85. (SCI)

11. Tien-Li Chang, Dar-Sun Liou, Ping-Hei Chen, Hung-Yi Lin, Fuh-Yu Chang,

“Ultrasensitive Electrical DNA Identification with Bio-Bar-Code DNA and

Nanoparticles in Nanogap Device,”, Tamkang Journal of Science and Engineering,

June, 2007. (EI)

會議論文

1. Shuo-Hung Chang, Fuh-Yu Chang, Jen-Hui Tsai, Tung-Chuan Wu , Mao-Kuo Wei,

“Advanced Nanoimprint for Optical Applications”, The 1st Asian Symposium of

Nanoimprint Lithography, Seoul, Korea, April 24-26, 2008. (Invited speaker)

2. Fuh-Yu Chang, Hung-Yi Lin, Wen-Lang Lai, , Chia- Jen Ting, Jen-Hui Tsai,

Shuo-Hung Chang, and Tung-Chuan Wu, “Development of Rolling Nanoimprint

Technology and Related Applications”, Nanoimprint and Nanoprint Technology

Conference(NNT 2007), Paris, France, 2007. (Invited speaker)

3. Tien-Li Chang, Hung-Yi Lin, Wen-Lang Lai, Fuh-Yu Chang, Jen-Hui Tsai, Shuo-Hung Chang, “Study of Nanopattern Forming with Chemical Coatings for

Silicon-Based Stamp in Nanoimprint Process”, 7th IEEE Conference on

Nanotechnology, Hong Kong, 2007.

4. Tien-Li Chang, Hung-Yi Lin, Fuh-Yu Chang, Ya-Wei Lee, Ping-Hei Chen,

“Applications of Magnetic Nanoparticles in Engineering and Biomedical Science”,

7th IEEE Conference on Nanotechnology, Hong Kong, 2007.

5. Fuh-Yu Chang, Hung-Yi Lin, Wen-Lang Lai, , Chia- Jen Ting, Jen-Hui Tsai,

Shuo-Hung Chang, and Tung-Chuan Wu, “Status of the Nanoimprint Technology in

ITRI”, Nanoimprint Process Solution Consortium, Tsukuba, Japan, 2007. (Invited

speaker)

6. B.T. Chia, D.R. Chang, H.H. Liao, Y.J. Yang, W.P. Shih, F.Y. Chang, K.C. Fan,

“Temperature Sensor Array Using Flexible Substrate”, Kobe, Japan, IEEE MEMS,

2007.

7. M.Y. Cheng, W.Y. Chang, L.C. Tsao, S.A. Yang, Y.J. Yang, W.P. Shih, F.Y. Chang,

K.C. Fan, Design and Fabrication of an Artificial Skin Using PI-Copper Films”, IEEE

MEMS, Kobe, Japan, 2007.

8. I.R. Huang, C.H. Lin, F.Y. Chang, H.B. Chou, ”Novel forming for fabrication of

micro V-cut grooves using the optical-element”, International Microprocesses and Nanotechnology Conference, Kyoto, 2007.

9. Chi-Hsiang Hsieh, Jiunn-Der Liao, Chang-shu Kuo, Ju-Yang Wang, Ching-Tzu Hsu,

Chao-Yu Huang, Fuh-Yu Chang, “A lithographical method by oxidization through a

conductive template in contact with a silicon substrate mediated by a thin water layer”,

International Conference on Solid State Devices and materials (SSDM 2007), Tokyo,

Japan, Sept. 19-21, 2007.

10. Bonnie T. Chia, Duo-Ru Chang, Hsin-Hung Liao, Yao-Joe Yang, Wen-Pin Shih,

Fuh-Yu Chang, Kuang-Chao Fan, “Flexible Temperature Sensor Array on a Polyimide

Film”, ISMTII 2007, Sendai, Japan, 2007.

11. Li-Chi Tsao, Duo-Ru Chang, Wen-Pin Shih, Fuh-Yu Chang, Shuo-Hung Chang,

Kuang-Chao Fan, “Fabrication and characterization of electro-active polymer for

flexible tactile sensing array”, ISMTII 2007, Sendai, Japan, 2007.

12. M.Y. Cheng, W.Y. Chang, L.C. Tsao, S.A. Yang, Y.J. Yang, W.P. Shih, F.Y. Chang,

and K.C. Fan, “AN ARTIFICIAL SKIN: A Large Area Temperature and Tactile

Sensing Array”, ISMTII 2007, Sendai, Japan, 2007.

13. Kai-Tai Song and Meng-Ju Han, Fuh-Yu Chang, Shuo-Hung Chang, “A Robotic

Facial Expression Recognition System Using Real-Time Visual Tracking”, ISMTII

2007, Sendai, Japan, 2007.

14. Tien-Li Chang, Jung-Chang Wang, Yi-Jen Tsai, Ying-Rui Huang, Chun-Chi Chen,

Hung-Yi Lin, Fu-Hsiang Ko, and Fuh-Yu Chang, , “Study of Ni Nanopattern Stampswith Non-Fluorine Coating Treatment in Nanoimprint Process,” SNDT 2007, Hsinchu,

Taiwan, 2007.

15. Tien-Li Chang, Fuh-Yu Chang, Hung-Yi Lin, Wen-Lang Lai, Jen-Hui Tsai,

Shuo-Hung Chang, “Effects of Mold Pattern with Anti-Adhesive Treatment in

Nanoimprint Lithography,” MATADOR Conference, Taipei, Taiwan, 2007.

16. Tien-Li Chang, Hung-Yi Lin, Fuh-Yu Chang, Wen-Lang Lai, Yi-Fan Hsieh,

Chih-Hsiang Chang, Ping-Hei Chen, “Ultrasensitive Electrical DNA Sensor Using

Nanoparticle-Based Bio-Bar-Code DNA and Nanogap Electrodes,” 10th Nano

Engineering and Micro Systems Technology Conference (NMC2007), Hsinchu,

Taiwan, 2007.

17. Fuh-Yu Chang, Hung-Yi Lin, Wen-Lang Lai, Chia-Jen Ting, Jen-Hui Tsai,

Shuo-Hung Chang, Tung-Chuan Wu, “ Roll to Roll Processing for Nanophotonics”,

ASME International Design Engineering Technical Conferences (IDETC), September

4-7, Las Vegas, USA, 2007.

18. Tien-Li Chang, Chun-Chi Chen, Hung-Yi Lin, Fu-Hsiang Ko, Fuh-Yu Chang,

“Study of Mold Nanopatterns with Chemical Coatings for Ni-Based Stamp in

Nanoimprint Lithography,” 51st International Conference on Electron, Ion, and

Photon Beam Technology and Nanofabrication (EIPBN2007), Colorado, USA, 2007.

19.吳奕德,謝易達,翁志強,陳家浩,王明誠,張復瑜,廖峻德,“低能量電子束照射之烷基硫醇自組裝單分子層化學吸附於金面做為微影製程之抗蝕刻阻劑”,2007材料年會,新竹,2007.

20. Chi-Hsiang Hsieh, Jiunn-Der Liao, Chang-shu Kuo, Ju-Yang Wang, Ching-Tzu

Hsu, Chao-Yu Huang, Fuh-Yu Chang, _Electric induced modification of the SAMs

by the conductive template, 2007材料年會,新竹, 2007.

21. M.Y. Cheng, W.Y. Chang, L.C. Tsao, S.A. Yang, Y.J. Yang, W.P. Shih, F.Y. Chang,

K.C. Fan, “Integrated Temperature and Tactile Sensing Arrays on a Flexible

Substrate”, International Manufacturing Leaders Forum, Taipei, 2006.

22. C.H. Cheng, M.T. Yen, F.Y. Chang, L.C. Tsao, W.P. Shih, S.H. Chang, K.C. Fan,

“Characterization of Pressure Sensitive Rubber for Artificial Skin of Robotics”,

International Manufacturing Leaders Forum, Taipei, 2006.

23. I.R. Huang, C.H. Lin, F.Y. Chang, H.B. Chou, ”A CMOS Process Optimized

Curled-Hinge Comb Micro-Mirror”, International Manufacturing Leaders Forum,

Taipei, 2006.

24. M.C. Huang, C.H. Lin, F.Y. Chang, “Novel Roller Mold Fabrication using

Soft-Lithography and Electro-Chemical Engraving”, International Manufacturing

Leaders Forum, Taipei, 2006.

25. M.C. Huang, C.H. Lin, F.Y. Chang, _Novel application for Roller Mold

Fabrication using Soft-lithography technique, 奈米工程暨微系統技術研討會,2006.

26. F.Y. Chang, H.Y. Lin, C.H. Hsueh, K.W. Chen, S.H. Chang, T.C. Wu, “A study of

mechanical failure and anti-adhesive treatment for nanoimprint process”, International

Microprocesses and Nanotechnology Conference, 2006, pp. 296-297.

27. M.J. Han, J.H. Hsu, K.T. Song, F. Y. Chang, “Embedded Emotion Recognition

System Using Key Feature Sets”, Proceedings of 2006 CACS Automatic Control

Conference, Tamsui, Taiwan, 2006.

28. F.Y. Chang, H.Y. Lin, C.H. Hsueh, C.S. Tsai, K.W. Chen, S.H. Chang, T.C. Wu,

“Micro/Nano Imprint and Applications”, International Symposium of Micro and Nano

Technology, Hsinchu, 2006. (Invited speaker)

29. K.W. Chen, H.Y. Lin, F.Y. Chang, S.H. Chang, T.C. Wu, J.F. Lin, “A study of the

self-assembled mono-layer deposition process for the anti-adhesion of nano-imprint

stamps”, 6th IEEE Conference on Nanotechnology, Cincinnati, USA, July 16-20,

2006, Volume 2, pp. 592–594.

30. Fuh-Yu Chang, Hung-Yi Lin, Chun-Hway Hsueh, Shuo-Hung Chang,

Tung-Chuan Wu, “Fabrication of Periodic Nanostructure in Nanoimprint Process”,

6th IEEE Conference on Nanotechnology, Cincinnati, USA, July 16-20, 2006, Volume

2, pp.21-22.

31. C.H. Lin, R. Chen, C.C. Su, F.Y. Chang, “Ultrasonics for nanoimprint

lithography”, 5th IEEE Conference on Nanotechnology, Nagoya, Japan, July 11-15,

2005, Volume. 2, pp. 460-463.

32. F.Y. Chang, C. Ting, H.Y. Tsai, H.Y. Lin, T.C. Wu, _Fine Grinding and Polishing

Process for Next Generation Photomask Substrate, 奈米工程暨微系統技術研討會_, 2000.

33.林宏彝,張復瑜,趙崇禮,馬廣仁,劉道恕,The Surface Morphology and

Sub-Surface Characteristics of ELID-Ground Single Crystal Silicon, 奈米工程暨微系統技術研討會, 2000.

34. C.L. Chao, K.J. Ma, S.C. Sheu, H.Y. Lin, F.Y. Chang, “Investigation of the

Surface Integrity of Precision Machined Single Crystal Silicon”, The 15th Annual

Meeting of ASPE, October, 2000.

35. F.Y. Chang, H.Y. Lin, T.C. Wu, “Fine Grinding and Mechano-chemical Polishing

for Brittle Hard-disk Substrate Manufacturing”, The 15th Annual Meeting of ASPE,

October, 2000.

36. C.C. Tsai, J.C. Lin, F.Y. Chang, H.Y. Lin, T.C. Wu, “Electrochemical Polishing of

Indium Tin Oxide Film”, The 15th Annual Meeting of ASPE, October, 2000.

37. F.Y. Chang, K.C. Lai, H.Y. Lin, T.C. Wu, _Fine Grinding for brittle Materials,

奈米工程暨微系統技術研討會, 新竹,1999.

38. F.Y. Chang, K.C. Lai, H.Y. Lin, T.C. Wu, “Grinding Tool Design for Fine

Grinding”, International Conference of the European Society for Precision

Engineering and Nanotechnology, Bremem, Germany, 1999.

39. S.H. Chang, F.Y. Chang, H.Y. Lin, T.C. Wu, “Ductile-mode Grinding of 300 mm

Diameter Silicon Wafer”, International Conference of the European Society for

Precision Engineering and Nanotechnology, Bremem, Germany, 1999.

40. 張復瑜,賴國智,林宏彝,吳東權,“硬脆材料基板的Fine Grinding 加工法,磨粒加工技術論文發表會,台北,1999. (Invited speaker)

41. T.H.C. Childs, F.Y. Chang, in: D. Dowson (Ed.), Proc. 22nd Leeds-Lyon

Symposium on Tribology, Tribology Series 31, Elsevier, Amsterdam, 1996, pp.

631-638.

42. T.H.C. Childs, F.Y. Chang, in: Proc. Int. Tribology Conf., JST, Tokyo, 1995, pp.

1709-1714.

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