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周賢鎧

個人網站
材料科學與工程系(所)
 
學經歷:
  學歷:
加州大學洛杉磯分校材料博士

經歷:
聯嘉積體電路股份有限公司
美商台灣應用材料公司
南亞塑膠股份有限公司


專業技術
  本實驗室以電漿與薄膜技術為基礎來發展介觀尺寸之微結構材料與薄膜材料,用以製作微感測器、發光及電子元件等。規劃發展的微結構材料包含介觀孔隙薄膜、奈米析出物陶金薄膜及優選取向薄膜。另一方面,本實驗室也發展高效率電子發射源的薄膜碳材、奈米碳管以及氮化物與氧化物奈米材料。
   
專利介紹
 
  互補式電阻式記憶體之製造方法  
一種互補式電阻式記憶體之製造方法,該方法包括在一基材表面沈積三層膜,再進行熱處理製程。該三層膜層中至......
 
  電阻式記憶體之可變電阻膜層的製造方法  
一種電阻式記憶體之可變電阻膜層的製造方法,該方法包括先將一基材放置於一濺鍍室內。在該濺鍍室中可以具有......
 
     
研究計畫
 

教授課程

電漿材料特論、材料微觀分析、積體電路製造程序與設備、微細製造概論、結晶與繞射

 期刊論文

 

  • B.-R. Huang, S. Jou, T.-C. Lin, Y.-K. Yang, C.-H. Chou, Y.-M. Wu, “ Field emission property of arrayed nanocrystalline diamond,” Diamond Rel. Mater. 20,314 (2011).
  • C.-J. Li, W.-L. Chen, S. Jou, “Resistance Switching of Copper-Doped Silica Films Grown by Sputter Deposition,” Jpn. J. Appl. Phys. 50, 01BG08 (2011).
  • I-H. Yu, S. Jou, C.-M. Chen, K.-C. Wang, L.-J. Pang, J. S. Liao, “Development of latent fingerprint by ZnO deposition,” Forensic Science International 207, 14-18 (2011).
  • A. A. Tseng, J.-I. Shirakashi, S. Jou, J.-C. Huang, T. P. Chen, “Scratch properties
  • of nickel thin films using atomic force microscopey,” Journal of Vacuum Science and Technology B 28, 202-210 (2010).
  • S. Jou, B.-R. Huang, M.-.C Wu, “Nanocrystalline Diamond Films as Cathode for Gas Discharge Sensors,” Thin Solid Films 518, 4458-4461 (2010).
  • B.-R. Huang, S. Jou, Y.-M. Wu, K.-H. Chen, L.-C. Chen, “Effect of XeF laser treatment on structure of nanocrystalline diamond films,” Diamond Rel. Mater. 19, 445-448 (2010).
  • P.-C. Wei, S. Chattopadhyay, F.-S. Lin, C.-M. Hsu, S. Jou, J.-T. Chen, P.-J.
  • Huang, H.-C. Hsu, H.-C. Shih, K.-H. Chen and L.-C. Chen, “Origin of the anomalous temperature evolution of photoluminescence peak energy in degenerate InN nanocolumns,” Optics Express 17, 11690-11697 (2009).
  • B.-R. Huang, H.-C. Chen, S. Jou, I.-N. Lin, “UNCD Electron Emitter Using Si-Nanorods as a Template,” Vacuum 84, 111-114 (2009).
  • B.-R. Huang, S. Jou, M.-C. Wu, “Field emission and electric discharge of nanocrystalline diamond films,” Journal of Electronic Materials 38, 750-755  (2009).
  • S. Jou, J.-J. Pan, B.-R. Huang, “Silicon nanocones generated by sputter deposition,” Journal of Nanoscience and Nanotechnology 9, 5927-5931 (2009).
  • B.-R. Huang, T.-H. Wu, S. Jou, W.-R. Chen, J.-F. Hsu, C.-S. Yeh, “Effect of triode structure on field emission properties of nanocrystalline diamond films”, Diamond Rel. Mater. 18, 235-237 (2009).
  • S. Jou, T.-H. Wu, “Thin porous Ni–YSZ films as anodes for a solid oxide fuel cell”, J. Phys. Chem. Solids, 69, 2804-2812 (2008).
  • A. A. Tseng, S. Jou, A. Notargiacomo, T. P. Chen, “Development of tip-based
  • nanofabrication and its roadmap”, Journal of Nanoscience and Nanotechnology,8, 2167-2186 (2008)
  • C. J. Wang, S. Jou, “Study of Copper-Doped SiO2 Films Prepared by Co-Sputtering of Copper and SiO2,”J. Phys. Chem. Solids, 69, 523-526 (2008).
  • S. Jou, D.-Y. Yeh, A. A. Tseng, “Nickel nanorods produced by annealing composite oxide films,” Journal of Nanoscience and Nanotechnology 8, 390-392 (2008). (SCI)
  • S. Jou, T.-W. Chi, “Texture Development of Thin Films of Tetragonal Zirconia Polycrystal (TZP) Deposited by Reactive Sputtering,” Vacuum 81, 911-919(2007).
  • C.-F. Hsieh, S. Jou, “Titanium nitride electrodes for micro-gap discharge,’’ Microlelectronics Journal 37, 867-870 (2006).
  • S. Jou and K. C. Hsu, “Mesoporous Pt Electrode Preparation Using Sputter Deposition and Reduction Treatment,” Journal of Applied Electrochemistry (in
  • revision).
  • Y. H. Chung, S. Jou, “Carbon nanotubes from catalytic pyrolysis of polypropylene,” Materials Chemistry and Physics 92, 256-259 (2005).
  • W.-C. Chen, S. Jou, C.-F. Chiu, “Formation of Novel Silicon Nitride with Face-Centered Cubic Crystal Structure in a TaN/Ta/Si(100) Thin Film System,” Japanese Journal of Applied Physics Vol. 44, No. 7A, pp. 4814-4819 (2005).
  • S. Jou, C.-T. Sun and X. Chen, “Silicon carbide films from polycarbosilane and their usage as buffer layers for diamond deposition,” Diamond & Related Materials 14, 1688-1694 (2005).
  • H.-M. Yen, S. Jou, C.-J. Chu, “Si-O-C nanotubes from pyrolyzing polycarbosilane in a mesoporous template,” Materials Science and Engineering
  • B 122/3, 240-245 (2005).
  • S. Jou and C. K. Hsu, “Preparation of Carbon Nanotubes from Vacuum Pyrolysis
  • of Polycarbosilane,” Materials Science and Engineering B 106, 275-281 (2004).
  • S. Jou, H. J. Doerr and R. F. Bunshah, “Electron Emission Characterization of Diamond Thin Films Grown from a Solid Carbon Source,” Thin Solid Films 280,256-261 (1996).
  • P. Muggli, R. Brogle, S. Jou, H. J. Doerr, R. F. Bunshah and C. Joshi, “Photoemission from Diamond and Fullerene Films for Advanced Accelerator Applications,” IEEE Trans. Plasma Science, Vol. 24, no. 2, 428-438 (1996).
  • S. Jou, H. J. Doerr and R. F. Bunshah, “Diamond Coatings from a Solid Carbon Source,” Thin Solid Films 253, 95-102 (1994).
  • Y. H. C. Cha, S. Jou, S. Prakash, H. J. Doerr and R. F. Bunshah, “Synthesis of b-SiC Thin Films for High Temperature Sensors by the Activated Reactive Evaporation Process,” Materials Science and Engineering, A 163, 207-210(1993).
  • R. F. Bunshah, S. Jou, S. Prakash, H. J. Doerr,L. Issacs, A. Wehrisg, C. Yeretzian,
  • H. Cynn and Francois Diederich, “Fullerene Formation in Sputtering and Electron Beam Evaporation Processes,” J. Phys. Chem. 96 , 6866-6869 (1992).

研討會論文

 

  • 利嘉仁,栗漢翔,周賢鎧,2010,「銅摻雜二氧化矽薄膜之電阻切換性質」,中國材料科學學會,公元2010 年材料年會論文。
  •  C.-J. Li, W.-L. Chen, S. Jou, 2010, “Resistance Switching of Copper-Doped Silica Films Grown by Sputter Deposition,” The Third International Symposim on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2010), Toyama, Japan, June 22-25, 2010.
  • C.-J. Li, W.-L. Chen, S. Jou, 2009, “Resistance Switching of Copper-Doped Silica Films Grown by Sputter Deposition,” TACT 2009 International Thin Films Conference, Taipei, Taiwan, December 14-16, 2009.
  •   B.-R. Hunag, S. Jou, K. H. Chen, L. C. Chen, Y. M. Wu, 2009, “Effect of XeF laser treatment on structure of nanocrystalline diamond films”, Diamond 2009, 20th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides, Paper No. P1.3.03, Athens, Greece, September 6-10, 2009.
  • 廖勝權,陳枝政,周賢鎧,2008,「多孔性銅之製作」,中國材料科學學會,公元2008 年材料年會論文。
  • 黃昭棋,周賢鎧,2008,「成長微奈米結構氧化鈷薄膜暨應用於氣體感測器之研究」,中國材料科學學會,公元2008 年材料年會論文。
  •   J. C. Huang, C.-Y. Yeh, C.-L. Tsai, A. A. Tseng, and S. Jou, 2008, “The Study of Nanooxidation Pattern on Si Substrate Using Atomic Force Microscopy”, Proceedings of the First International Workshop on Tip-Based Nanofarication (TBN2008), Paper No. P-16, Taipei, Taiwan, October 19-21, 2008.
  •  S. Jou, B.-R. Huang, J.-Y. Mao, W.-R. Chen, S.-B. Wang, 2008, “Effect of Metal Layers on Electron Emission For Nanocrystalline Diamond Film,” 12th Joint Vacuum Conference, 10th European Vacuum Conference, and 7th Annual Meeting of the German Vacuum Society, Balatonalmádi, Hungary, September 22-26, 2008.
  •  B.-R. Huang, H.C. Chen, S. Jou, I-N. Lin, 2008, “UNCD electron emitters using Si nanowires as template”, Second International Conference on New Diamond and Nano Carbons (NDNC2008), Taipei, Taiwan, May 26-29, 2008.
  •    B.-R. Huang, T.-H. Wu, S. Jou, W.-R. Chen, J.-F. Hsu, C.-S. Yeh, 2008, “The effect on the field emission properties of the triode structure for nanocrystalline diamond films”, the 2nd International Conference on New Diamond and Nano Carbons (NDNC2008), Taipei, Taiwan, May 26-29, 2008.
  •   J. C. Huang, S. Jou, Z. Li, and A. A. Tseng, 2007, “Development of Tip-Based Nanofabrication”, in Taiwan-Tohoku Joint International Symposium for Mechanical Science Based on Nanotechnology, pp.126-138, December 7-8, 2007,National Taiwan University, Taiwan.
  •   A.Tseng, , S. Jou, A. Notargiacomo, and T. P. Chen, 2007, “Development of tip-based nanofabrication and its roadmap", in Proceedings of ICAM2007on Advanced Manufacture, Paper No. A2-96, Taipei Chapter, Society of Manufacturing Engineers and National Cheng Kung University, Tainan, Taiwan.
  •   林志名,周賢鎧,2007,「以濺鍍法製備之氧化鈰與氧氣感測器薄膜之研究」,2007 能源與光電鍍膜科技研討會,台灣鍍膜科技協會。(NSC NSC95 – 2622 –E – 011-001)
  •    葉東育,王上瑜,周賢鎧,2007,「以共濺鍍法製備固態氧化物燃料電池之鎳-氧化鈰-氧化鋯複合薄膜之研究」,中國材料科學學會,公元2007 年材料年會論文。(NSC NSC95 – 2218 – E – 011-004)
  •  B.-R. Huang, C.-S. Huang, S. Jou, J.-Y. Mao, W.-R. Chen and S.-B. Wang, 2007,
  •    “Field Emission Properties of Nanocrystalline diamond Films Grown on Different Metal Layers,” IVC-17/ICSS-13 and ICN+T2007, Stockholm, Sweden, July 2-6, 2007.
  •  Y. Chung, S. Jou, 2007, “Generation of carbon nanotubes from catalytic pyrolysis of amorphous silicon carbide,” NDNC 2007, First International Conference of New Diamond and Nano Carbons, Paper No. P2-8, Osaka, Japan, May 28-31, 2007.
  •  葉東育,吳姿慧,周賢鎧,2006,「以共濺鍍法製備固態氧化物燃料電池之陽極薄膜研究」,中國材料科學學會,公元2006 年材料年會論文。(NSC NSC94 – 2218 – E – 011-004)
  •   白景文,楊孟儒,周賢鎧,2005,「多孔性基材上之氧化鋅體聲波共振濾波器研製」,中國材料科學學會,公元2005 年材料年會論文。
  •  吳姿慧,周賢鎧,2005,「以共濺鍍法製備固態氧化物燃料電池之陽極薄膜研究」,中國材料科學學會,公元2005 年材料年會論文。
  • J. Wang, S. Jou, “Study of Copper-Doped SiO2 Films Prepared by Co-Sputtering of Copper and SiO2,” ISPN2005, the 2nd International Symposium on Point Defect and Nonstoichiometry, Kaohsiung, Taiwan, R. O. C., October 4-6, 2005.
  •  C.-L. Yeh, C.-T. Wu, K.-H. Chen, L.-C. Chen, S. Jou, J.-S. Hwang, “Growth and Photoluminescence Characteristics of InN Thin Films,” 中國材料科學學會,公元2004 年材料年會論文(2004)。
  •   Chang and S. Jou, “The Effect of Yttrium Niobate on the Electrical Conductivity of Yttria-Stabilized Zicronia,” CIMTEC 2002, 10th International Ceramic Congress, Florence, Italy, July 14-18, Vol. 5, 761-770 (2002).
  •    鍾裕湖,顏曉楣,周賢鎧,「以聚碳矽烷製成奈米碳管及其場發射性質之研究」,中國材料科學學會,公元2002 年材料年會論文(2002)
  •   許凱超,紀廷瑋,周賢鎧,「以反應式濺鍍及還原反應製備微孔性薄膜電極」,中華民國90 年材料年會論文 (2001)。
  •  許肇根,鍾裕湖,周賢鎧,「以聚丙烯合成奈米碳管之研究」,中華民國90年材料年會論文(2001)。

專利

  •   周賢鎧,利嘉仁,“電阻式記憶體之可變電阻膜層的製造方法Method of Fabricating Variable Resistance Layer for Resistance Memory”,中華民國專利,US Patent,JP Patent,申請中(2010)(台科大編號980072)。
  •    周賢鎧,廖勝權,“多孔性網狀金屬的製造方法中華民國專利,公開號200930480 (公開日2009,07,16)。
  • 周賢鎧,葉東育,“一維金屬奈米級結構的製造方法”,中華民國專利,公開號200916407 (公開日2009,04,16)。
  •  周賢鎧,彭展崢,“矽奈米錐及其陣列的製作方法”,中華民國專利,公開號200911682 (公開日2009,03,12)。
  • S. Jou and D.-Y. Yeh, “Method of Fabricating One-Dimensional Metallic Nanostructure”, US Patent Application Pub. No. 2009/0087567 (2009).
  • 周賢鎧,許肇根,“中空奈米碳管之製造方法”,中華民國專利,發明第194932號 (2004)。
  • R. F. Bunshan, S. Jou, S. Prakash and H. J. Doerr, “Production of Fullerenes by Electron Beam Evaporation”, US Patent No. 5,316,636 (1994).
  •   R. F. Bunshan, S. Jou, S. Prakash and H. J. Doerr, “Production of Fullerenes by Sputtering”, US Patent No. 5,494,558 (1996).
  •   R. F. Bunshah, S. Jou and H. J. Doerr, “Diamond Thin Film Electron Emitter”, US Patent No. 5,698,328 (1997).
  •   R. F. Bunshah, H. J. Doer and S. Jou, “Plasma Enhanced Chemical Transport Process for Forming Diamond Films”, US Patent No. 5,747,118 (1998)

研究計畫

 
  • 以電漿轉化程序合成應用於場發射顯示器之微晶鑽石複合薄膜 1998/11~1999/07 國科會
  • 多孔性與楔形微晶鑽石複合薄膜之合成及其場發射性質分析 1999/08~2000/07 國科會
  • 薄膜電極之製程及微結構研究(1/2) 2000/08~2001/07 國科會
  • 薄膜電極之製程及微結構研究(2/2) 2001/08~2002/07 國科會
  • RF 頻帶用聲波濾波器之研發-子計畫二-高波速高壓電係數多層基板之研發2001/08~2002/07 國科會
  • 射頻頻帶用聲波濾波器之研發-子計畫二-高波速高壓電係數多層基板研發(I) 2002/08~2003/07 國科會
  • 奈米管結構及性能分析2003/04~2003/09 南美特科技以含碳氟的烷氧基矽有機金屬先驅物電漿氣相沉積低介電膜製程的開發 2002/12~2003/11南美特科技 國科會
  • 射頻頻帶用聲波元件之研發-子計畫二:氣隙型氮化鋁薄膜體聲波振盪器研製(1/2) 2003/08~2004/07 國科會
  • 過電壓保護元件之放電特性研究2003/10~2004/07 誠佑科技
  • 射頻頻帶用聲波元件之研發-子計畫二:氣隙型氮化鋁薄膜體聲波振盪器研製(2/2) 2004/08~2005/07 國科會
  • 先進固態氧化物燃料電池材料界面反應與匹配性研究-子計畫一:以濺鍍法形成陶金陽極之微結構與型態研究(1/3) 2004/11~2005/10 國科會
  • 先進固態氧化物燃料電池材料界面反應與匹配性研究-子計畫一:以濺鍍法形成陶金陽極之微結構與型態研究(2/3) 2005/11~2006/10 國科會
  • 先進固態氧化物燃料電池材料界面反應與匹配性研究-子計畫一:以濺鍍法形成陶金陽極之微結構與型態研究(3/3) 2006/11~2007/10 國科會
  • 高性能氧氣感測器之開發(1/2) 2006/8~2007/7 國科會
  • 矽奈米錐陣列之研製及結構與性質分析2008/8~2009/7 國科會
  • 奈米氧化銅太陽能集熱材料研製2009/1~2009/12 國科會
  • 混合氧化物薄膜之電阻切換性質與微結構研究 2009/8~2011/7 國科會
  • 薄膜電阻元件研究2009/11~2010/7 大毅科技
  • 含奈米鎳銅之陶金薄膜集熱材料研製2010/1~2010/12 國科會

   

 




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